Technical Description; MEMS Growth; Applications

• Technical Description; MEMS Growth
• MEMS Applications

Methodology and Scope

• Methodology
• Scope

Microelectromechanical Systems (MEMS)

Major Research Findings

• Description
• MEMS Products

MEMS Fabrication Technologies

• Applications
• Investment and the Marketplace
• Kionix and Calient--Examples of MEMS Companies

Optical MEMS Systems

Optical Switching

RF Switching

Biomedical Applications

• Introduction
• MOEMS--The Fastest-Growing MEMS Segment
• Possible Applications of MOEMS

Micromotion

• Introduction
• Broadband Internet Needs Optical Switching
• Optical Switch Fills Missing Link in Network
• Breakthrough Technology for Optical Wireless Networking
• MOEMS Seesaw Switches Light
• MOEMS Knocking Electrons Out of Optical Switching

Introduction

EFAB: Making MEMS for an Expanding Market

Competing Fabrication Technologies

MEMS Packaging

Manufacturing Methods for MOEMS

MEMS Design; Simulation; and Analysis

Advanced Fabrication Technologies

Protective Coatings

• Moving MEMS to the Foundry Floor
• Problems Can Be Opportunities

Thickness Variation for MEMS Fabrication

• Introduction
• The MEMS Market and Barriers to Commercialization

MEMS Sensor Market

Gas Sensors

Microfluidics and Lab-on-a-Chip

MEMS Systems

Photonics

Integrated Microsystems

Microfluidic Systems

Devices

Materials

Processes and Measurements

NEMS: Why and How

Recent NEMS

MEMS Research Organizations; Key Contacts

Recent Patents

Contacts

Recent US Patents