Electronic Materials: Coatings and Surface Technology for Future Applications (Technical Insights)

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Table of Contents

Electronic Materials, Executive SummaryIntroductionIntroductionMarket OutlookOptoelectronics and Electronic Materials MarketSemiconductor Materials MarketsTechnical ChallengesTechnical ChallengesResistance and CapacitanceHeat DissipationHow Small Can Circuits Become?Fabrication TechnologyMetallization and PatternsHigher-Resolution Light SourceOrganic MaterialsElectronic Materials, IntroductionIntroductionIntroductionOverview of Coatings and Surface TechnologiesOverview of Coatings and Surface TechnologiesCoatings for Use at High TemperaturesCoatings to Resist High-Temperature CorrosionTechnology Advancements in Coating ProcessesVapor Deposition TechnologyPhysical Vapor Deposition (PVD) TechnologiesChemical Vapor Deposition (CVD) TechnologiesStructure and Properties of Hard CoatingsIon-Assisted Deposition and Ion Beam TechnologiesLaser-Assisted Deposition; Characterization; and ApplicationOptical Thin FilmsRecent Advances in Optical Coating TechnologyStructure/Property RelationshipsElectro-Optic and Transparent Conductive FilmsPolymer Film Deposition TechnologyDiamond and Related MaterialsSynthesis and Characterization of Diamond and Related MaterialsElectronic; Optical; and Thermal Applications of Diamond and Related MaterialsProperties and Applications of Diamond; Diamond-Like and Cubic Boron Nitride CoatingsSynthesis; Characterization; and Applications of Boron Nitride; Carbon Nitride and Fullerene StructuresTribological Coatings/Surface ModificationsCoatings Resistant to Severe and Unusual EnvironmentsMechanical Characterization; Micromechanical Testing and ModelingCoating and Thin-Film CharacterizationMechanical Properties and AdhesionNondestructive and in Situ CharacterizationSurface and Thin-Film AnalysisCharacterization of Thin-Film Growth Processes and Evolving Film PropertiesTheoretical and Experiential Limitations of Size and DimensionInnovations in Thin-Film Manufacturing ProcessesScale-Up; Manufacturing Aspects and Industrial Applications of CoatingsFlat-Panel Display TechnologiesDecorative CoatingsInnovative Electrochemical Deposition (ECD) for Innovative Alternatives or Combined LayersNew Horizons in Coatings and Thin FilmsMagnetic MaterialsNovel Materials for Micro-electromechanical Systems (MEMS)Ferroelectric MaterialsNovel Materials and ProcessesElectronic Materials, Technology: Theoretical Limitations and PromisesChipmakers Face a Looming Performance BarrierChipmakers Face a Looming Performance BarrierHow Thick Can the Thinnest Silicon Integrated Circuit Layers Be?How Thick Can the Thinnest Silicon Integrated Circuit Layers Be?Bell Labs Builds Five-Atom-Thick Gate OxidesBell Labs Builds Five-Atom-Thick Gate OxidesHow “Micro” Can We Go?How “Micro” Can We Go?Integrated Photonics and Electronics Edging Closer to Total Systems-on-a-ChipIntegrated Photonics and Electronics Edging Closer to Total Systems-on-a-ChipSmoothing a Silicon Surface to the Last AtomSmoothing a Silicon Surface to the Last AtomTechnologyChemical Vapor Deposition Research Reactor Uses Hot Gas; Cool JetsChemical Vapor Deposition Research Reactor Uses Hot Gas; Cool JetsThe Future of Computer Processors Could Be SphericalThe Future of Computer Processors Could Be SphericalFormula Allows Growth of Smooth Metal Films on Semiconductor SubstratesFormula Allows Growth of Smooth Metal Films on Semiconductor SubstratesTechnologyCommercialization“Holey” Silicon Brightens Future for Computers; Optical Devices“Holey” Silicon Brightens Future for Computers; Optical DevicesExperimental Proof of Maverick Theory of High-Temperature SuperconductivityExperimental Proof of Maverick Theory of High-Temperature SuperconductivityElectronic Materials, Market Research and Future DirectionsSEMI Consensus Forecast Sees 18% Growth in 2000SEMI Consensus Forecast Sees 18% Growth in 2000Roadmap Anticipates Future Problems in Semiconductor DevelopmentRoadmap Anticipates Future Problems in Semiconductor DevelopmentMarket Forecast: Sol-Gel Ceramic FilmsMarket Forecast: Sol-Gel Ceramic FilmsForecastFaster; Cheaper Computer Revolution May End Soon; Say University of Florida ResearchersFaster; Cheaper Computer Revolution May End Soon; Say University of Florida ResearchersIvory Tower Meets Marketplace on the WebIvory Tower Meets Marketplace on the WebApplications for Microdisplays Approaching Mass-Market OpportunitiesApplications for Microdisplays Approaching Mass-Market OpportunitiesElectronic Materials, Ceramics and Nonconductive Amorphous OxidesHydrothermal Processing of Thin-Film CeramicsHydrothermal Processing of Thin-Film CeramicsTechnologyFabrication of Mesoporous Silica Films with Through ChannelsFabrication of Mesoporous Silica Films with Through ChannelsTechnologyCommercializationThick Silica Films for Integrated OptoelectronicsThick Silica Films for Integrated OptoelectronicsHigh-Temperature Fine Wire Coating for Extreme EnvironmentsHigh-Temperature Fine Wire Coating for Extreme EnvironmentsDeposition of High-Quality Silicon Dioxide Films at Low TemperaturesDeposition of High-Quality Silicon Dioxide Films at Low TemperaturesTechnologyCommercializationMesoporous Silica Films Insulate SemiconductorsMesoporous Silica Films Insulate SemiconductorsCommercializationAlumina Films: Key to Faster; Smaller CircuitsAlumina Films: Key to Faster; Smaller CircuitsTechnologyCommercializationThe Search for New Amorphous Thin Films with High Dielectric ConstantsThe Search for New Amorphous Thin Films with High Dielectric ConstantsProgress UpdateCommercializationProcess Forms Ceramic Films in Air Without VacuumProcess Forms Ceramic Films in Air Without VacuumCommercializationElectronic Materials, Advanced Inorganic Materials and Their ApplicationsApply Yttria-Stabilized Zirconia (YSZ) Coatings Using Stabilized DC SputteringApply Yttria-Stabilized Zirconia (YSZ) Coatings Using Stabilized DC SputteringTechnologyCommercializationGrowth of Group III-V Oxide Compounds for Vertical-Cavity Surface-Emitting Lasers (VCSELs)Growth of Group III-V Oxide Compounds for Vertical-Cavity Surface-Emitting Lasers (VCSELs)TechnologyCommercializationSelf-Assembled Inorganic Film Fights Corrosion; Holds CatalystsSelf-Assembled Inorganic Film Fights Corrosion; Holds CatalystsEpitaxy Produces First Gallium Nitride UV SensorEpitaxy Produces First Gallium Nitride UV SensorCommercializationGallium Nitride Boosts Transistor PowerGallium Nitride Boosts Transistor PowerDeposition of Aluminum Nitride at Low Temperatures by Gas-Phase PhotolysisDeposition of Aluminum Nitride at Low Temperatures by Gas-Phase PhotolysisImproved Performance with Gallium Arsenide FilmImproved Performance with Gallium Arsenide FilmTechnologyCommercializationGrow Epitaxial Zinc Selenide on Nonpolar SubstratesGrow Epitaxial Zinc Selenide on Nonpolar SubstratesTechnologyMetal-Organic Chemical Vapor Deposition of Zinc Phosphide Polycrystalline FilmsMetal-Organic Chemical Vapor Deposition of Zinc Phosphide Polycrystalline FilmsTechnologyCommercializationGrow Piezoelectric Langasite Films by Liquid Phase EpitaxyGrow Piezoelectric Langasite Films by Liquid Phase EpitaxySearching for Silicon Carbide DielectricsSearching for Silicon Carbide DielectricsSingle-Source Precursor Grows Silicon Carbide Thin FilmsSingle-Source Precursor Grows Silicon Carbide Thin FilmsTechnologyHigh-Temperature Chemical Vapor Deposits Thick Layers of Silicon CarbideHigh-Temperature Chemical Vapor Deposits Thick Layers of Silicon CarbideTechnologySynthesis of a New Cubic Phase of Silicon NitrideSynthesis of a New Cubic Phase of Silicon NitrideResearchers Get Closer to Boron Nitride Thin FilmsResearchers Get Closer to Boron Nitride Thin FilmsCommercializationHydride Vapor Phase Epitaxy (HVPE) Deposits a Thick Gallium Nitride Film Suitable for LEDsHydride Vapor Phase Epitaxy (HVPE) Deposits a Thick Gallium Nitride Film Suitable for LEDsTechnologyCommercializationDesign of New Gallium Nitride Semiconductor SwitchesDesign of New Gallium Nitride Semiconductor SwitchesLiquid-Delivery MOCVD Grows Lanthanum Manganite Films for HeadsLiquid-Delivery MOCVD Grows Lanthanum Manganite Films for HeadsTechnologyBarrier Layer Enhances Indium Tin Oxide CoatingsBarrier Layer Enhances Indium Tin Oxide CoatingsCommercializationApply Superconducting Thin Films Using OzoneApply Superconducting Thin Films Using OzoneTechnologyCommercializationElectronic Materials, Diamond Films and CoatingsCooling Electronic Components with Diamond CoatingIntroductionMetal Coating of Synthetic Diamond for Electronic PackagingMetal Coating of Synthetic Diamond for Electronic PackagingTechnologyCommercializationClosing in on Ideal Synthesis of Diamond-Like Carbon FilmsClosing in on Ideal Synthesis of Diamond-Like Carbon FilmsTechnologyLower-Pressure Process Produces Diamonds from GraphiteLower-Pressure Process Produces Diamonds from GraphiteDiamond-Like Nanocomposite Coatings More Stable Than Diamond-Like Carbon CoatingsDiamond-Like Nanocomposite Coatings More Stable Than Diamond-Like Carbon CoatingsTechnologyCommercializationMicropatterned Diamond Film by Site-Selective Plasma CVDMicropatterned Diamond Film by Site-Selective Plasma CVDTechnologyCommercializationCVD Diamond Film in DosimetersCVD Diamond Film in DosimetersTechnologyCommercializationMicrowave Plasma Chemical Vapor Deposition Diamond Radiation WindowsMicrowave Plasma Chemical Vapor Deposition Diamond Radiation WindowsTechnologyCommercializationHow to Seed High-Nucleation DiamondHow to Seed High-Nucleation DiamondTechnologyCommercializationMultilayer Diamond Senses and HeatsMultilayer Diamond Senses and HeatsTechnologyCommercializationSuperhard Diamond Coating for Metals and Plastics Also Stands AloneSuperhard Diamond Coating for Metals and Plastics Also Stands AloneTechnologyCommercializationDeposition of Isotopically Pure FilmsDeposition of Isotopically Pure FilmsTechnologyElectronic Materials, Metal Deposition; Definition and ApplicationsVapor Deposit Nanoscale Metal Structures for ElectronicsVapor Deposit Nanoscale Metal Structures for ElectronicsTechnologyCommercializationNanoscale Giant Magnetoresistant Films Show Better CoercivityNanoscale Giant Magnetoresistant Films Show Better CoercivityBetter Plasma Etching and Cleaning Process for Magnetic Random Access Memories Better Plasma Etching and Cleaning Process for Magnetic Random Access MemoriesTechnologyCommercializationDeposit Nanometer Clusters with Electrochemical TechniqueDeposit Nanometer Clusters with Electrochemical TechniqueTechnologyElectroplating Method Completely Coats Particles with MetalElectroplating Method Completely Coats Particles with MetalCommercializationSurface Modification Improves BatteriesSurface Modification Improves BatteriesTechnologyCommercializationLasers Direct Electroless Plating of Metals on Ceramic OxidesLasers Direct Electroless Plating of Metals on Ceramic OxidesMark-Resistant Steel Coming for Computer Cabinets and Metal FurnitureMark-Resistant Steel Coming for Computer Cabinets and Metal FurnitureTechnologyCommercializationIncrease Wettability of Fluxless Solder by Adding BismuthIncrease Wettability of Fluxless Solder by Adding BismuthTechnologyFree Software Enables Advanced SolderingFree Software Enables Advanced SolderingTechnologyCommercializationApply Aluminum Thin Coat Using Chemical Vapor DepositionApply Aluminum Thin Coat Using Chemical Vapor DepositionTechnologyCommercializationNickel Plating a Monster MirrorNickel Plating a Monster MirrorElectronic Materials, Silicon TechnologyLiquid Phase Epitaxy Grows Silicon Layers on Ribbon SheetLiquid Phase Epitaxy Grows Silicon Layers on Ribbon SheetCheaper; Quasi-Monocrystalline Thin-Film Solar Cells EmergeCheaper; Quasi-Monocrystalline Thin-Film Solar Cells EmergeTechnologyCommercializationDiamond Find: Carbon; Plus Germanium; Helps Silicon “Shine”Diamond Find: Carbon; Plus Germanium; Helps Silicon "Shine"New Luminescent Films May Be Key to Photonic ComputersNew Luminescent Films May Be Key to Photonic ComputersAmorphous Silicon-Based Solar Cells Come into Their OwnAmorphous Silicon-Based Solar Cells Come into Their OwnDoped Polysilicon Improves Large Thin-Film TransistorDoped Polysilicon Improves Large Thin-Film TransistorTechnologyComputing on Silicon Balls Moves AheadComputing on Silicon Balls Moves AheadTechnologyCommercializationEtching MEMS onto Existing Integrated CircuitsTechnologyPhotolithographic Fabrication of Microrelays on a Silicon ChipPhotolithographic Fabrication of Microrelays on a Silicon ChipTechnologyCommercializationElectronic Materials, Organic Films; Coatings; Liquid Crystals and MembranesLiquid Crystal Glass Films Emit Polarized Light for Cheaper OptoelectronicsLiquid Crystal Glass Films Emit Polarized Light for Cheaper OptoelectronicsTechnologyCommercializationPolymer Diodes Promise Flexible Display TechnologyPolymer Diodes Promise Flexible Display TechnologyTechnologyLiquid Crystal Film Protects against Flash BlindnessLiquid Crystal Film Protects against Flash BlindnessOrganic Displays May Be FeasibleOrganic Displays May Be FeasibleDeposition of Electroluminescent Polymers Using Chemical Vapor DepositionDeposition of Electroluminescent Polymers Using Chemical Vapor DepositionTechnologyDirect Growth of Ultra-thin Films Using Live PolymersDirect Growth of Ultra-thin Films Using Live PolymersTechnologyCommercializationOrganic Crystals for Second-Order Nonlinear OpticsOrganic Crystals for Second-Order Nonlinear OpticsTechnologyCommercializationNew Class of Conductive Adhesives Resists Corrosion; WearNew Class of Conductive Adhesives Resists Corrosion; WearTechnologyCommercializationSingle Polymer Layer Glows in MulticolorsSingle Polymer Layer Glows in MulticolorsVapor Deposit Low-Dielectric Polymeric Thin FilmsVapor Deposit Low-Dielectric Polymeric Thin FilmsTechnologyCommercializationElectronic Materials, Specific Applications for Selected MaterialsSemiconducting Nanopowders Make Cheaper Pollution SensorsSemiconducting Nanopowders Make Cheaper Pollution SensorsTechnologyWorld’s Smallest Silicon Mechanical DevicesWorld’s Smallest Silicon Mechanical DevicesCreate Solar Cells Thinner Than Human HairCreate Solar Cells Thinner Than Human HairPlasma-Enhanced Organometallic CVD Polymeric Fibers Withstand CompressionPlasma-Enhanced Organometallic CVD Polymeric Fibers Withstand CompressionTechnologyCommercializationThin Film Controls the Dissipation of Spacecraft ChargingThin Film Controls the Dissipation of Spacecraft ChargingTechnologyResilient Metal and Ceramic Coatings for Medical ImplantsResilient Metal and Ceramic Coatings for Medical ImplantsThin Transparent Film Coatings Are PhotochromicThin Transparent Film Coatings Are PhotochromicElectronic Materials, Fabrication and Manufacturing TechnologiesA Compliant Universal Substrate for Less Expensive Thin-Film Devices A Compliant Universal Substrate for Less Expensive Thin-Film DevicesTechnologyCommercializationUniversal Substrate for SemiconductorsUniversal Substrate for SemiconductorsCoating Electronics at Low TemperaturesCoating Electronics at Low TemperaturesTechnologyCommercializationGel Improves Thermal Management in ElectronicsGel Improves Thermal Management in ElectronicsPowerful Light Source Forms Smaller Details on ChipsPowerful Light Source Forms Smaller Details on ChipsTechnologyCommercializationExtreme Ultraviolet Optics Etch More Detail on WafersExtreme Ultraviolet Optics Etch More Detail on WafersTechnologyControlled Ion Beam Microdeposits Many Material TypesControlled Ion Beam Microdeposits Many Material TypesCommercializationSelf-Assembled Monolayers Form Ultra-thin ResistsSelf-Assembled Monolayers Form Ultra-thin ResistsTechnologyCommercializationLow-Energy Beams Enhance DepositionLow-Energy Beams Enhance DepositionDeposit High-Quality Hard Coatings with Filtered Cathodic Vacuum ArcDeposit High-Quality Hard Coatings with Filtered Cathodic Vacuum ArcTechnologyCommercializationGray-Scale Etching Builds Precise Microscale FeaturesGray-Scale Etching Builds Precise Microscale FeaturesVacuum Deposit Ionized Media in Electromagnetic BottleVacuum Deposit Ionized Media in Electromagnetic BottleMBE Is Key to Laser with Multiple Widely Separated WavelengthsMBE Is Key to Laser with Multiple Widely Separated WavelengthsTechnologyCommercializationNanophase-Separated Polymer Films for OpticsNanophase-Separated Polymer Films for OpticsTechnologyCommercializationHigh-Power Pulsed Magnetron Sputtering for Hard CoatingsHigh-Power Pulsed Magnetron Sputtering for Hard CoatingsTechnologyCommercializationPulsed Laser Deposition Method Grows Ferroelectric Crystal Layers on SiliconPulsed Laser Deposition Method Grows Ferroelectric Crystal Layers on SiliconOxidizing Amorphous Silicon Creates Better TransistorsOxidizing Amorphous Silicon Creates Better TransistorsCommercializationAdvances in Smart-Cut Silicon-on-Insulator TechnologiesAdvances in Smart-Cut Silicon-on-Insulator TechnologiesTechnologyCommercializationRadiation-Hardened Silicon-on-Insulator Static Random Access MemoryRadiation-Hardened Silicon-on-Insulator Static Random Access MemoryDry Etching Forms Anisotropic Nanoscale StructuresDry Etching Forms Anisotropic Nanoscale StructuresTechnologyCommercializationCombustion CVD Technology Scales up for Microelectronics; Solar CellsCombustion CVD Technology Scales up for Microelectronics; Solar CellsCommercializationElectronic Materials, Characterization and Measurement of Coatings and SurfacesDetect Dark Current Inhomogeneity in SemiconductorsDetect Dark Current Inhomogeneity in SemiconductorsTechnologyCommercializationSurface Character Counts with Ultra-thin Magnetic FilmsSurface Character Counts with Ultra-thin Magnetic FilmsCommercializationNoncontact Wafer Thin-Film Measurement Goes to the EdgeNoncontact Wafer Thin-Film Measurement Goes to the EdgeTechnologyMeasure Semiconductor Thick FilmsMeasure Semiconductor Thick FilmsTechnologyUltrasonic Force Microscope (UFM) Produces Images at Nanoscale ResolutionUltrasonic Force Microscope (UFM) Produces Images at Nanoscale ResolutionTechnologyCommercializationStudying the Interior of Materials with a Magnetic Force MicroscopeStudying the Interior of Materials with a Magnetic Force MicroscopeLaser Spallation Measures Thin-Film Interface StrengthLaser Spallation Measures Thin-Film Interface StrengthCommercializationElectronic Materials, Unique Materials and Structures of InterestSlice Nanotubes into MacromoleculesSlice Nanotubes into MacromoleculesCooling High-Temperature Microchips with Microtubular Heat PipesCooling High-Temperature Microchips with Microtubular Heat PipesTechnologyCommercializationMicroprinting Advances in Complexity; ReproducabilityMicroprinting Advances in Complexity; ReproducabilityTechnologySound Waves Form Ferrite Thin Films on Fine SpheresSound Waves Form Ferrite Thin Films on Fine SpheresNew Material Shows Superior Lubricating PropertiesNew Material Shows Superior Lubricating PropertiesResearchers Develop First Flexible SemiconductorsResearchers Develop First Flexible SemiconductorsElectronic Materials, Ceramic Films Formed in AirIntroductionIntroductionPerspectivePerspectiveTechnologyTechnologyMist VaporizesUse for SuperconductorsMist Contains Tiny ParticlesCarrier Gas Causes PressureVarious Gas Mixtures Can Be UsedProcess Uses Conventional GeneratorsSubstrates Are VariedShutter Plays Key RoleFilm Thickness Has Wide RangeApplicationsApplicationsAntistatic Films for SheetsDeposit Nanosize PowdersSuperconductor FilmsCoat Turbine Blades; Glass and MoreImpact and CommercializationImpact and CommercializationElectronic Materials, ResourcesTrade and Professional OrganizationsSemiconductor Equipment and Materials International (SEMI)Product Development & Management AssociationIC Insights Inc. ASM InternationalAmerican Vacuum SocietyThe Minerals; Metals & Materials SocietySociety of Vacuum CoatersUniversity and Public Research Centers in the United StatesUniversity and Public Research Centers in the United StatesUniversity and Public Research Centers Outside the United StatesUniversity and Public Research Centers Outside the United StatesIndustrial OrganizationsIndustrial OrganizationsManufacturing and Testing OrganizationsA & A Co. Inc.Advanced Materials Instruments and Analysis Inc.AMS WorldwideART Inc.Aston Metallurgical Services Co. Inc.Ausimont USABrodmann & Co. LLC F. J.BTU InternationalCerac Inc.CMI InternationalComposite Technology Development Inc.Corrmet Engineering ServicesCrystallumeDeFelsko Corp.DeWal Industries Inc.Elcometer Instruments Ltd.Electro Abrasives Corp.Enthone-OMI Inc.Euromat GmbHEutectic Corp.Falmer Thermal SprayFinishing.comFused Metals Inc.General Magnaplate Corp.Hardface Alloys Inc.Heany IndustriesHI Tec Metal GroupHoltgren Inc.Implant Sciences Corp.Inco Ltd. (Inco SPP)Ion Tech Inc.Metaplas IononMicromet Instruments MTS Systems Corp.Nimet Industries Inc.Pelseal Technologies LLCPraxair Inc.Purtech Inc.Quad Group Inc. Rigaku USA Inc. SB Boron Corp.St. Louis Metallizing Co.Swain Technology Inc.Thermal Spray Technologies Inc.Tiodize Turbine Coatings Inc.Vac Aero International Inc.Van Technologies Inc.Wall Colmonoy Corp.Resources and Contact Details for Organizations Profiled in This ReportResources and Contact Details for Organizations Profiled in This ReportElectronic Materials, Selected US PatentsPatentsUS Patent 6008872US Patent 6008505US Patent 6008128US Patent 6008126US Patent 6008116US Patent 6008086US Patent 6008076US Patent 6007652US Patent 6005542S Patent 6005270US Patent 6004886US Patent 6002574US Patent 6002159US Patent 6001742US Patent 6001714US Patent 6001677US Patent 6001539US Patent 5998995US Patent 5998803US Patent 5998304US Patent 5994759US Patent 5993919US Patent 5993770US Patent 5989970US Patent 5989693US Patent 5989635US Patent 5985744US Patent 5985470US Patent 5985105US Patent 5982004US Patent 5981868US Patent 5981404US Patent 5981403US Patent 5981306US Patent 5981092US Patent 5980723US Patent 5976990US Patent 5976989US Patent 5976931US Patent 5976716US Patent 5972726US Patent 5968846US Patent 5968611US Patent 5965192US Patent 5948541US Patent 5930638US Patent 5929517US Patent 5916634US Patent 5900056US Patent 5876808US Patent 5858451US Patent 5856231US Patent 5853888US Patent 5769154US Patent 5650361US Patent 5540959US Patent 5488350US Patent 5438402US Patent 5366770US Patent 5364562US Patent 5213851US Patent 5191099US Patent 5157015US Patent 5120703US Patent 5100868US Patent 5339657




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