Impact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights)

 

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This study discusses the technology development activities associated with MEMS technology and its commercialization/market potential in the Industrial Automation arena.

Table of Contents

Impact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), Executive SummaryScope and MethodologyOverviewScope of the Research ServiceMethodologyKey Research FindingsTechnology SnapshotKey Technologies and InnovationsAnalyst InsightsImpact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), MicromanufacturingTechnology SnapshotOverview of MicromanufacturingImportance of MicromanufacturingBulk MicromanufacturingOverview of EtchingIsotropic and Anisotropic EtchingDry and Wet EtchingSurface MicromachiningGeneral DescriptionSurface Micromachining ProcessThe LIGA ProcessGeneral DescriptionElectroplatingThe SLIGA ProcessImpact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), MEMS Technology and Applications OverviewMEMS SenorsTechnology ViewpointPressure SensorsAccelerometersGyroscopesGas SensorsProximity/Position SensorsFlow SensorsHumidity; Temperature/Thermal SensorsMechanical Stress SensorsAcoustic Wave SensorsMEMS ActuatorsTechnology ViewpointMicromotorsMicropumpsMicrovalvesMicroturbinesMicromirrorsMEMS Actuator Types and Lab-on-a-Chip SystemsImpact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), Technology Impact and Adoption Factor AnalysisTechnology Impact AnalysisMEMS versus Conventional TechnologyTechnology RoadmapTechnology Features; Benefits; and TrendsTechnology Adoption Factor AnalysisAnalysis of Technology DriversAnalysis of Technology RestraintsImpact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), Global Technology DevelopmentsInnovations in MEMS Sensors--Global DevelopmentsDissolved Wafer Process for Manufacture of MEMS Pressure Sensors--Integrated Sensing Systems Inc.--USANonsilicon-Based Process for MEMS Tactile Sensors--ThailandVibration Power Harvesting--USAiMEMS and iSensor Technologies--Analog Devices--USAMEMS-Based Capacitive Sensors for RF Communication-- University of Twente--NetherlandsOptic Fibers MEMS Pressure sensors--Nanjing Normal University--ChinaMEMS Pressure Sensors for Harsh Environments--Iowa State University--USADigital Pressure Sensor Technology--SwitzerlandSystem-on-Chip for Wireless Sensor Networks--Dust Networks Inc.--USAPassive Wireless Sensors--Georgia Institute of Technology--USAInnovations in MEMS Actuators--Global DevelopmentsIntegrated System for Rotating Microengines--TEGAM Inc.--USAMEMS Silicon Clocks--SiTime Inc.--USAMEMS-Based Industrial Equipment Monitoring--GermanyMEMS Gas Turbine Engine--USAMicrochip for MEMS Flow Control System--Microstaq Inc.--USACombustion Driven Fluidic Actuator--Georgia Institute of Technology--USAMicrovision Inc.--USADigital Microfluidics--University of WashingtonMicromachined Vibratory Gyroscopes--University of BerkleyImpact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), Innovative Developments in Micromachine Tools and ProcessesUniversity Research--World1st Generation Micromilling--Georgia Institute of Technology--USA3-Axis MesoMill--MIT--USAIndustrial Development and Systems Integration Applications--ITRI--TaiwanMicroforming--Extrusion of Micropins--Northwestern University--IllinoisCorporate Research--USA4-Axis Micromill--Atometric Inc.Nanowires as Replacements for Lithography--Hewlett Packard3-Axis Micromill--Micro Machines International Inc.Impact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), Funding Analysis and Worldwide Innovation AssessmentVenture Capital; Public Sector and Company Funding; and SWOT AnalysisVenture Capital FundingPublic Sector FundingCompany Funding and SWOT AnalysisWorldwide Innovation AssessmentUSA and Latin AmericaCanadaEuropeAsia PacificImpact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), Patent Analysis and Key ContactsPatent AnalysisRecent PatentsPatent Analysis--WorldwideDatabase of Key ParticipantsResearch ContactsCorporate ContactsImpact Analysis of MEMS-Based Sensors and Actuators on Industrial Automation (Technical Insights), Decision Support DatabaseDatabase TablesGlobal Semiconductor and Semiconductor Equipment Market--World (1999 to 2006)Machine Tool Production--World (1999 to 2006)PCB Sales--World (1999 to 2006)Consumer Electronics Contribution to Electronic Industry--World (1999 to 2006)Control and Instrumentation Contribution to the Electronics Industry--World (1999 to 2006)




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