MEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights)

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This is an analytical report that covers new developments in microelectromechanical systems

Table of Contents

MEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), Executive SummaryTechnical Description; MEMS Growth; ApplicationsTechnical Description; MEMS GrowthMEMS ApplicationsMethodology and ScopeMethodologyScopeMEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), IntroductionMicroelectromechanical Systems (MEMS)DescriptionMEMS ProductsMajor Research FindingsApplicationsInvestment and the MarketplaceKionix and Calient--Examples of MEMS CompaniesMEMS Fabrication TechnologiesIntroductionMaterials Problems in the Microworld Are Not MicroproblemsLeveraging Very Large-scale Integration (VLSI) Manufacturing ExperienceElectrochemical Fabrication Technologies (EFAB)MEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), MEMS ApplicationsOptical MEMS SystemsIntroductionMOEMS--The Fastest-Growing MEMS SegmentPossible Applications of MOEMSOptical SwitchingIntroductionBroadband Internet Needs Optical SwitchingOptical Switch Fills Missing Link in NetworkBreakthrough Technology for Optical Wireless NetworkingMOEMS Seesaw Switches LightMOEMS Knocking Electrons Out of Optical SwitchingRF SwitchingRF ApplicationsMEMS Techniques Could Build Better RF PartsTune Frequency of MEMS OscillatorBiomedical ApplicationsMicromirrors Robust Enough for EndoscopesMicrorobots Work with Individual CellsMicromotionMicrofabricated Cell Sorter Is DisposableTI; UC Irvine; Collaborate on Silicon MicromotorsPolyimide Knees Move MicrorobotsRotary Engine Is Prototype for Silicon ModelTiny Propulsion System Targets Future MicrosatellitesMEMS Key To Maintaining Large Space StructuresMEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), MEMS FabricationIntroductionMoving MEMS to the Foundry FloorProblems Can Be OpportunitiesEFAB: Making MEMS for an Expanding MarketIntroductionThe MEMS Market and Barriers to CommercializationCompeting Fabrication TechnologiesBulk MicromachiningSurface MicromachiningVLSILIGA and Related TechnologiesHybrid SystemsExcimer LasersInstant MaskingEFAB SubsystemsEFAB Limitations and AdvantagesMEMS PackagingIntroductionAre MEMS Packaging Efforts Sufficient?Manufacturing Methods for MOEMSIntroductionSandia Spins Off Commercial MEMS CompanyPhotonics Drives First US LIGA FoundryMEMS Design; Simulation; and AnalysisIntroductionNumerical Technology Analyze MEMS DesignFive Tips for Effective MEMS DesignSimulation Software Developed for MEMSMeshless Numerical Methods Simplify Device Design and AnalysisAdvanced Fabrication TechnologiesSoft X-rays to Create Enhanced Optical Network DevicesSoft Lithography Makes Moving MachinesSelf Assemble Surface Micro PatternsLiquid Lenses Focus Laser MicromachiningLine Stepper Placed at Taiwan-Based MEMS ManufacturerMeasure Shapes of Microcomponents via HolographyNew Technology Makes the Micro Components of Diamond FilmGet 3D Machining Down to Submicrometer ScaleManufacturing Technique Brings MEMS into MainstreamProtons Micromachine MEMS Without MasksRP of Composite Microstructures under Way at Georgia TechProtective CoatingsSoluble Aromatic Polymers Are Not Influenced by SiliconPolymer Films for MEMSProtective Coatings for Your MEMSImprint Nanostructure Without TouchingThickness Variation for MEMS FabricationVery Thin Silicon Chips Offer AdvantagesMore Layers Make Better; More Complex MEMSMEMS Get Five Levels of PolysiliconMEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), Sensor Applications of MEMSMEMS Sensor MarketRevolution in Chemical DetectionMEMS Impacts Movement SensorsDelphi Focuses on New Market Applications with its Intellek SensorsLand Mine Detection Goes NanoMEMS-Based Sensors Get a Readout and Control ChipGas SensorsMEMS-Based Gas Sensor Alters Chip Process MonitoringPhotoacoustics Applied to Gas Leak DetectionMOEMS Technology Enables Sensitive; Low-Cost Gas SensorchipMEMS Chemical Sensor TunableMicrofluidics and Lab-on-a-ChipMEMS Lab-on-a-Chip Micro Flow Adjusts SelfVirtual Walls Create Microfluidic ChannelsSmall Canals Are a Big Advance for Lab-on-a-Chip TechnologyPrint DNA on a ChipProtein Makes Biochip SpecificMEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), Space and Military ApplicationsMEMS SystemsIntroductionSatellitesPackagingMicro Power GenerationPhotonicsIntroductionInformation Processing with PhotonicsCommunicationsMEMS Device Shows Tankers Outside WorldIntegrated MicrosystemsDARPA's Philosophy on the Development of Microsystem TechnologiesDesign ToolsMicrofluidic SystemsToday's BiochipMicroscale IntegrationFluid Control SystemsMEMS Satellites LaunchedPower Is a Problem for PicosatellitesMEMS to Help Keep Inflatable Space Structures AlignedMEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), Some Current MEMS ResearchDevicesMEMS Device Switches PhotonsMEMS Eyelid Blinks Faster than LaserNew Technique Found for Light-driven MicromachinesOcean Vessel 'Smart Skins' with Embedded Sensors May Fight TurbulenceMaterialsBetter NLO MaterialsShrinking Size of Piezoelectric Structures Compromises SensitivityProcesses and MeasurementsGenetic Toggle Switch Could Turn on Wet MEMSResearchers Pioneer Techniques to Lubricate MicrodevicesStrain Positions Micromachined StructuresNanotribologists Find High Friction among AtomsResearchers Develop Model for Lost Performance in Thin FilmsTensile Technique Cracks MEMS Component Testing ProblemsStudy Looks to Nuclear Energy as Micro-Scale FuelMEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), Nano-Electromechanical Systems (NEMS)NEMS: Why and HowTo Keep Shrinking; We'll Need MoletronicsResearch Laying the Groundwork for NEMSNanomechanical Systems Start to Challenge MEMSNSF Seeks 16 Percent Increase in Nanotechnology BudgetRecent NEMSUSC Robot Moves Molecule-size Particles into Precise LocationsHeat Affects Friction in Silicon NEMSBearings and Springs Made from NanotubesMachine Nano Bearings and SwitchesNanojets Draw Tiny Features; Inject GenesLost Wax Molds Nano Colloidal StructuresMaking Tiny 3D Structures by NanolithographyProcess Developed for Making Nanoscale Silicon StructuresSingle Electron Shakes Buckyball TransistorMEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), MEMS Research Organizations; Key Contacts; Recent PatentsMEMS Research Organizations; Key ContactsMEMS Research OrganizationsKey ContactsRecent PatentsUS Patents From June 2001Selected US Patents Before June 2001MEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), ContactsContactsContactsMEMS: Powerhouse for Growth in Sensors; Actuators and Control Systems--2nd Edition (Technical Insights), Recent US PatentsRecent US PatentsRecent US Patents




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