MEMS: Powerhouse for Growth in Sensors; Actuators; and Control Systems (Technical Insights)

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This reports provides an evaluation of key developments in microelectromechanical systems, including analysis of their applications, fabrication techniques, and markets.

Table of Contents

MEMS: Powerhouse for Growth in Sensors; Actuators; and Control Systems (Technical Insights), Executive SummaryExecutive SummaryExecutive SummaryMEMS: Powerhouse for Growth in Sensors; Actuators; and Control Systems (Technical Insights), Microelectromechanical Systems and Microsystems Technology (Research; Design; and Application Trends)Microelectromechanical Systems and Microsystems Technology (Research; Design; and Application Trends)Microelectromechanical Systems and Microsystems Technology (Research; Design; and Application Trends)Leveraging VLSIWireless MEMSMEMS ProductsMEMS MarketsMarket DynamicsFuture MEMS ApplicationsWireless ApplicationsDisplay TechnologyBiomedical InstrumentsStrain SensorsMEMS ResearchMEMS: Powerhouse for Growth in Sensors; Actuators; and Control Systems (Technical Insights), The MEMS MarketplaceThe MEMS MarketplaceThe MEMS MarketplaceMarket BarriersMarket BarriersMarket StudiesMarket StudiesInkjet PrintheadsMEMS-based Data Storage Devices for Hard Disk DrivesAerospace Pressure SensorsAirbag AccelerometersAutomotive GyroscopesMedical Pressure Sensors for Blood Pressure MonitoringMEMS Applications (Real and Potential)MEMS Applications (Real and Potential)BibliographyBibliographyMEMS: Powerhouse for Growth in Sensors; Actuators; and Control Systems (Technical Insights), MEMS Fabrication and Related ProcessesMEMS Fabrication and Related ProcessesMEMS Fabrication and Related ProcessesBulk MicromachiningSurface MicromachiningPhotolithographyWafer BondingWire BondingDry EtchingLIGAMEMS: Powerhouse for Growth in Sensors; Actuators; and Control Systems (Technical Insights), MEMS Companies and Research OrganizationsMEMS Companies and Research Organizations; A-CAdvanced MicroMachines Inc.Alberta Microelectronics CentreAlcatel Comptech Inc.AMP Inc.Analog Devices Inc.Analogy Inc.Applied Microengineering Ltd.BCAM International Inc.BEI Sensors & Systems Co.Berkeley MicroInstrumentsRobert Bosch GmbHBoston UniversityBREED Technologies Inc.Brigham Young UniversityCadence Design Systems Inc.California Institute of TechnologyCaliper Technologies Corp.Carnegie-Mellon UniversityCase Western Reserve UniversityCepheidCornell UniversityCoyote Systems Inc.Crossbow Technology Inc.CSEM (Centre Suisse d’Electronique et de Microtechnologie SA)Cyrano Sciences Inc.MEMS Companies and Research Organizations; D-HDaimler-Benz AGDefense Advanced Research Projects Agency (DARPA)Technical University of Delft Charles Stark Draper LaboratoryEG&G IC SensorsEMSTO--The Europe Information Clearinghouse of Microsystems TechnologyEtec Systems Inc.Forschungszentrum KarlsruheFord Microelectronics Inc.Fraunhofer Institute for Silicon TechnologyFraunhofer Institute for Solid State TechnologyGeorgia Institute of TechnologyHahn-Schickard-Gesellschaft (HSG-IMIT)Honeywell Inc.Hughes Research Laboratories Inc.MEMS Companies and Research Organizations; I-LImperial College of Science; Technology and MedicineInstitute of Micro Systems TechnologyInstitute of Microtechnology MainzIntegrated Micro InstrumentsIntegrated Sensor SolutionsIntelliSense Corp.InterScience Inc.Inter-University Micro-Electronics Center Iridigm/Etalon Inc.Irvine Sensors Corp.i-STAT Corp.Karl Suss America Inc.Katholieke University LeuvenJet Propulsion LaboratoryLAAS-CNRSLawrence Livermore National Laboratory (LLNL)Los Alamos National LaboratoryLouisiana State UniversityLucas NovaSensorLucent TechnologiesMEMS Companies and Research Organizations; M-NMassachusetts Institute of TechnologyThe Microelectronics and Computer Technology Corporation (MCC)MCNCMEMS ClearinghouseMEMS Optical Inc.MEMStek Products LLCMentor Graphics Corp.Microcosm TechnologiesMicroflow Inc.Micromachine Center of Tokyo (MMC)Micro Mo Electronics Inc.The MicroOptical Corp.Microvision Inc.Mikrostruktur-Initiative NRWMicrotronic A/SMotorola Corp. Sensor Products DivisionNanogen Inc.National Nanofabrication User Network (NanoNet)NASA Lewis Research CenterNational Institute of Standards and TechnologyNew Jersey Institute of TechnologyNoise Cancellation Technologies Inc.Northrop Grumman ESIDMEMS Companies and Research Organizations; O-SOak Ridge National LaboratoryOceana Sensor Technologies Inc.Orchid Biocomputer Inc.OKO TechnologiesPlasma-Therm Inc. Quinta Corp.Raytheon E-SystemsRedwood MicroSystems Corp.Rockwell Corp.Roger Grace AssociatesSAES Getters SpASandia National LaboratoriesSilicon Light MachinesSilicon Microstructures Inc.Soane BioSciences Inc.SprayChip Systems Corp.Standard Microsystems Corp.Stanford UniversitySurface Technology Systems Ltd.ST Systems USA Inc.Swiss Federal Institute of TechnologySwiss Foundation for Research in Microtechnology (FSRM)MEMS Companies and Research Organizations; T-ZTanner Research Inc.Technical University of BerlinTexas Christian UniversityTexas InstrumentsTiNi Alloy Co.TMS Technologies Inc.University of California; Berkeley University of California at Los AngelesUniversity of CincinnatiUniversity of Hawaii at ManoaUniversity of Illinois at Urbana/ChampaignUniversity of MichiganUniversity of NeuchâtelUniversity of SheffieldUniversity of SouthamptonUniversity of Southern CaliforniaUniversity of TwenteUniversity of WashingtonUniversity of Wisconsin at MadisonVAISALA OyjVirginia Semiconductor Inc.VTT MicroelectronicsXerox PARCMEMS: Powerhouse for Growth in Sensors; Actuators; and Control Systems (Technical Insights), Selected US Patents on MEMS TechnologySelected US Patents on MEMS TechnologySelected US Patents on MEMS Technology




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