Nanotechnology Innovations for Thin Film Equipment Industry-Nanotech Alert

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Nanotechnology is considered as the tool for creating new materials, which cannot be synthesized by traditional industrial fabrication processes such as chemical vapor deposition (CVD). Atomic layer deposition is gradually replacing CVD due to the precision and quality of the films. With the influence of nanotechnology on ALD, the resulting material can be made 10x to 100x thinner in a more cost-effective way as compared to CVD films. These nano-enabled ALD techniques enable new applications for a wide spectrum of substrate materials with improved performance. The Nanotech Alert provides intelligence on technologies, products, processes, applications and strategic insights on nanotechnology-related innovations

Table of Contents

Nanotechnology Innovations for Thin Film Equipment Industry-Nanotech AlertRecent Innovations in Nanotechnology-enabled Thin Film EquipmentRoll-to-roll ALD-based Manufacturing SystemPlasma-enhanced Technology for Metal Applications ALD Equipment for ResearchNano-enabled ALD for Batteries and MEMSStrategic InsightsStrategic InsightsStrategic PerspectivesKey PatentsKey PatentsKey Patents (continued)Key Patents (continued)Industry ContactsIndustry Contacts

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