Semiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights)

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A detailed assessment of research and development in the field of semiconductor microlithography

Table of Contents

Semiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Executive SummaryIntroductionIntroduction to LithographyHighlights and Key FindingsScope and MethodologyScope of the Research ServiceMethodologySemiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Microlithography Technology AnalysisOptical Microlithography--Technology AnalysisOptical LithographyOptical Lithography Approaching Its LimitsOptical Lithography--Challenges / TrendsTechnology Challenges: Issues and TrendsImprovements and DrawbacksSemiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Next Generation Lithography (NGL)NGL DescriptionNext Generation LithographyChallenges AheadTechnology Analysis/ImpactAssessment of NGL TechnologiesTechnology Impact/Drivers/RestraintsSemiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Extreme Ultra Violet (EUV) LithographyEUV LithographyTechnology AnalysisTechnology DescriptionEUVL Challenges and Competing Technologies Benefits and DrawbacksApplications / Tools and EquipmentEUVL Research in Industry WorkgroupsTechnology Developments in North AmericaNanolithography using EUV Light -- Nikon Precision Inc. (USA)A Potential NGL contender -- Canon Inc (USA)EUV sources for Nanopatterning -- Cymer Inc (USA)Laser-Like Beam May Be Key to Nanotech Progress -- University of Colorado (USA)EUVL Technique for High Performance Computing -- National Laboratories (USA)Technology Developments in EuropeNovel NGL technique for IC applications -- ASML (Netherlands)EUVL requirements for High Volume Applications --- Medea+ and IMECMicrostepper with an Advanced Laser Technology -- Exitech Co (UK)Technology Developments in AsiaPacNanoengineering using EUVL Technology-- EUVA (Japan)Patterning Devices using Advanced EUV Sources and Equipments -- ASET (Japan)Semiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), E-Beam Lithography and other Maskless TechnologiesE-Beam LithographyElectron Projection Lithography (EPL)Optical Maskless Lithography Technology Challenges and Potential SolutionsSignificance and Drawbacks of EPLTechnology Developments in North AmericaA Novel E-Beam based Technique -- Nikon Precision Inc (USA)Parallel E-Beam Lithography for Nanoscale Devices -- OGI School of Science and Engineering (USA) Technology Developments in EuropeAn Innovative Multi-Beam Maskless Technology -- Mapper Lithography (Netherlands) E-Beam based tool for Research Applications -- RAITH GmbH (Germany)Maskless Lithography for Low Volume Applications -- Leica Microsystems (Germany)3D Lithography for Space Applications -- University of Durham (UK)Technology Developments in AsiaPacE-Beam based Lithography for Nano-patterning -- JEOL (Japan)Low Energy E-Beam Technique for Next Generation Devices -- LEEPL (Japan)Tuning E-Beam Lithography To Nanoscale Precision (Korea)Semiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Nano Imprint Lithography (NIL) and Immersion LithographyNano Imprint Lithography (NIL)Technology DescriptionHot EmbossingStep and Flash Imprint Lithography (SFIL)SFIL Drivers and ApplicationsNIL ChallengesBenefits and DrawbacksFluid Immersion TechnologyTechnology AnalysisTechnology DescriptionTechnology ChallengesBenefits and DrawbacksTechnology Developments in North America (Nano-Imprint Lithography)Nanopatterning Using Novel NIL Technique -- Nanonex Corp (USA)A Novel Imprint Technique to Replicate Nanoscale Structures -- Molecular Imprints Inc (USA)Direct Imprinting of Nanostructures on Silicon --- Princeton University (USA)Technology Developments in Europe and AsiaPac (Nano-Imprint Lithography)High Resolution Patterning using Imprint Technique -- EV Group (Austria)Advanced NIL Technique for Research and Industrial Applications -- Obducat AB (Sweden) 3D Nanolithography By Modified Soft Molding -- Seoul National University (Korea) Global Technology Developments (Immersion Lithography)Extending Optical Lithography Through Immersion Technique -- ASML (Netherlands)Immersion Lithography for 45nm Chip Production -- Nikon Precision Inc (USA)A Breakthrough Immersion Prototype Microstepper -- Rochester Institute of Technology (USA)Semiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Dip-Pen Nanolithography(DPN) and X-Ray Lithography (XRL)Dip-Pen Nanolithography (DPN)DPN Technology DescriptionDrivers/Restraints and ChallengesBenefits and DrawbacksX-Ray LithographyXRL Technology DescriptionDrivers/Restraints and ChallengesBenefits and DrawbacksTechnology Developments in Dip-Pen and X-Ray LithographyFabricating Nanostructures using Novel DPN Technique -- Nanoink Inc (USA)Direct Write Scanning Probe Patterning -- Northwestern University Nanotechnology Institute (USA)Patterning Surfaces with Nanoparticles -- Purdue University (USA)Nanopatterning Using DNA Ink -- California Institute of Technology (USA)Patterning Nanoscale Structures with X-Ray Lithography -- JMAR Technologies Inc (USA)Semiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Ion-Beam Lithography/Electrically Erasable Lithography and Research TrendsIon-Beam / EEL TechnologiesIon-Beam Lithography (IBL)Electrically Erasable Lithography (EEL)Technology Developments in North AmericaGrayscale Lithography Research at the University of Washington (USA)Gentle Lithography Research at National Research Council (Canada)Nanopatterning with a Qdot Pen and Blue Light -- University of California (USA)Self-Assembly Pattern Transfer Technique -- University of Massachusetts (USA)Soft Lithography Research at Harvard UniversityMaking Nanoscale Patterns - IBM’s Almaden Research Center (USA)Nanopatterning -- University of Minnesota (USA)Maskless Patterning of 3D Stuctures -- University of Illinois (USA)Nanoscale Light Source Shows Single Molecule Electroluminescence -- Georgia Institute of Technology (USA)Laser-like Expsoure Sources -- University of Colorado (USA)Technology Developments in EuropeSoft Lithography Research at Europe -- University of Groningen (Netherlands)Chemical/Biological Printing at 50-nm Scale -- University of Cambridge (UK)Nanolithography Using Holograms -- University of Bonn (Germany)Semiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Future Trends/Funds and GrantsFuture TrendsOverall AnalysisFuture Trends in the Semiconductor IndustryFunds and GrantsMajor Investments from Industry WorkgroupsOrganizations Funding Lithography Industry--VC Firms/KT Venture GroupSemiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Patent Analysis and Contact DetailsPatentsPatents Related to EUVLPatents Related to E-Beam LithographyPatents Related to Nano-Imprint lithographyPatents Related to Dip-Pen LithographyPatents Related to X-Ray LithographyPatents Related to Ion-Beam LithographyPatents Related to Lithography Equipment and Other Lithography TechnologiesParticipating Companies and Contact DetailsCorporate ContactsContacts in Universities and Research InstitutionsSemiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Frost & Sullivan 2004 Science and Technology AwardsTechnology LeadershipIntroductionAward RecipientTechnology InnovationIntroductionAward Recipient Excellence in TechnologyIntroductionAward RecipientSemiconductor Microlithography--Emerging Technologies Impacting the Electronics Markets (Technical Insights), Decision Support Database TablesDecision Support Database Tables related to Semiconductor LithographyGlobal Semiconductor and Semiconductor Equipment Market by Region: 1996-2004Number of Semiconductor Plants (in Units): 1988-2001Decision Support Database Tables related to Lithography ApplicationsNumber of Portable Computers Installed Base (Thousands): 1996-2004Total PC Installed Base (Million): 1996-2004Printed Circuit Board Sales (Million USD): 1998-2004




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